Design, Fabrication and Sensitivity Analysis of the Resistance Temperature Detector Thin Film Sensors

Thin film heat transfer sensors are most cost effective resistance temperature detector (RTD) sensors for dynamic temperature measurements mainly because of very fast response time (milliseconds or less). These sensors are prepared by deposited high conducting very sensitive gauge material (platinum/nickel/silver) on the insulating surface (pyrex/macor/quartz). The purpose of this work is to fabricate different types of thin film sensors by using high conducting platinum and nanomaterials. After fabrication all these sensors are statically calibrated by oil bath type methods and the typical value of sensitivity for each sensor are calculated and then compared the results between them.